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采用Ｍｏ／Ｂ４Ｃ材料在短波长波段（λ＜１０．０ｎｍ）进行软Ｘ射线多层膜实验研究。在指定波长（８．０ｎｍ附近）处对多层膜进行结构设计，并制备出了周期结构准确的Ｍｏ／Ｂ４Ｃ多层膜样品。
Soft X-ray multilayer film experiment was carried out using Mo / B4C material in the short wavelength band (λ <10.0nm). The multilayer films were designed at the specified wavelength (around 8.0nm) and the Mo / B4C multilayer samples with periodic structure were prepared.