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可调支撑装置是高精度光学元件的常用支撑结构。分析了可调支撑装置支撑力调节对光学元件面形的影响规律。建立可调支撑装置的力学模型,利用有限元法计算光学元件的变形,并对光学元件面形进行Zernike多项式拟合。不同工况下分析结果表明:均匀支撑时光学元件面形均方根(RMS)最小,可调支撑力变化时,引入的光学元件面形RMS以及主要Zernike多项式系数均与支撑力线性相关,与光学元件的初始支撑状态无关。建立Fringe Zernike系数随任意支撑力变化的敏感度矩阵,采用该矩阵预测随机工况下光学元件支撑力调整后面形,预测调节面形与有限元仿真调节面形基本一致,RMS误差优于0.3%,为可调支撑装置的设计与装调提供理论依据。
Adjustable support is a common support structure for high-precision optical components. The influence rule of the adjustable support device on the profile of optical element is analyzed. The mechanical model of the adjustable supporting device is established. The deformation of the optical element is calculated by using the finite element method, and the surface shape of the optical element is fitted with the Zernike polynomial. The results of analysis under different operating conditions show that the root mean square (RMS) of the surface area of the optical element is the smallest when the support is uniform and the RMS of the optical element surface and the main Zernike polynomial coefficients are linearly related to the support force when the adjustable support force changes. The initial supporting state of the optical element is irrelevant. The matrix of sensitivity of Fringe Zernike coefficient with arbitrary support force is established. The matrix is used to predict the shape of the optical element under random operating conditions. The predicted surface shape is basically the same as that of finite element simulation. The RMS error is better than 0.3% , To provide a theoretical basis for the design and installation of adjustable support device.