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一般光谱仪的小型化是通过缩小元件尺寸和元件间距离实现的,会降低仪器的性能。为实现高光通量、高光谱分辨率的红外光谱探测,提出一种基于ZnSe平板波导的小型光谱仪的设计方法。说明平板波导结构压缩光束的原理,根据介质中光栅的衍射特性,推导出光谱分辨率与各个参数的关系,给出一个小型光谱仪的具体设计。仪器的光谱范围为8~14μm,光谱分辨率为80 nm,数值孔径为0.3,光学系统是一整块ZnSe平板波导,尺寸为70 mm×70 mm×4 mm。并与相同设计指标下一般Czerny-Turner结构的光谱仪进行对比分析。结果表明基于ZnSe平板波导的小型光谱仪系统尺寸更小,光谱分辨率更高,光通量更大。
The general miniaturization of the spectrometer is achieved by reducing the size of the components and the distance between the components, degrading the performance of the instrument. In order to realize high luminous flux and hyperspectral infrared spectrum detection, a design method of small spectrometer based on ZnSe slab waveguide is proposed. The principle of compressing light beam in slab waveguide structure is described. According to the diffraction characteristic of the grating in the medium, the relationship between the spectral resolution and each parameter is deduced. The design of a miniature spectrometer is given. The instrument has a spectral range of 8 to 14 μm, a spectral resolution of 80 nm and a numerical aperture of 0.3. The optical system is a single piece of ZnSe slab waveguide with dimensions of 70 mm × 70 mm × 4 mm. And compared with the general Czerny-Turner structure spectrometer under the same design index. The results show that the small-scale spectrometer based on ZnSe slab waveguide has the advantages of smaller size, higher spectral resolution and larger luminous flux.