用随机位相屏模拟光学元件产生的低频位相误差 ,并用 RMS位相梯度对低频位相误差进行统计量化 ,通过对激光束传输过程进行模拟 ,对低频位相误差的叠加规律有了新发现 ,并对位相误差叠加规律进行了修改 ,为位相校正提供了理论上的依据 ;通过对光束聚焦过程进行研究 ,得到了低频位相误差影响光束焦斑尺寸的初步规律 ;并在此基础上提出了一种光束质量控制的新方法。 The phase error of the low frequency generated by the optical element is simulated by a random phase screen, and the phase error of the low frequency is quantified by the RMS phase gradient. By simulating the laser beam transmission process, the superposition law of the low frequency phase error has been newly discovered. The law of superposition is modified to provide a theoretical basis for phase correction. By studying the beam focusing process, the preliminary law of the influence of low-frequency phase error on the focal spot size of the beam is obtained. Based on this, a beam quality control The new method