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本文用阴极电弧源做离子渗金属源。源极的靶材用Ｔｉ、Ａｌ、不锈钢制做。弧源因 产生冷阴极弧光放电而产生金属等离子体，形成高密度的金属离子流。基板由钢材制 成，施加适当的负偏压．在基板负偏压作用下，金属离子轰击并加热基板至 ９００℃或 １１００℃。金属原子渗入钢中形成高渗速渗金属层．文中测试了渗金属层的组织形貌和 Ｔｉ、 Ａｌ、 Ｃｒ、 Ｎｉ在渗层中的分布。结果表明阴极电弧源离子渗金属技术是新的金属等离子 体表面合金化技术，是对多弧离子镀的发展。
In this paper, the cathode arc source ion permeability metal source. The source of the target with Ti, Al, stainless steel system. The arc source creates a metal plasma due to the cold cathode arc discharge, forming a high density metal ion flow. The substrate is made of steel with a suitable negative bias. Under the negative bias of the substrate, metal ions bombard and heat the substrate to 900 ° C or 1100 ° C. Metal atoms penetrate the steel to form a high-permeability, infiltration metal layer. In this paper, the microstructure of the infiltration metal layer and the distribution of Ti, Al, Cr and Ni in the infiltrated layer were tested. The results show that the cathode arc ion source metal infiltration technology is a new metal plasma surface alloying technology, is the development of multi-arc ion plating.