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小型气体激光器腔体增益孔的直径小于1 mm,深度大于10 mm,长径比大,传统的方法很难对其进行测量。为了解决这种微深孔的测量问题,介绍了一种接触测量与光学测量相结合的方法。将末端带有发光球的光纤伸入待测孔中,在待测零件孔中做x、y方向移动,当球与孔壁接触后,会引起球心做相应的运动,利用CCD捕获发光球的球心,通过图像处理,可得出接触点处测头球心的xy坐标,拟合多点测量结果,从而实现深孔的直径、圆柱度及直线度等参数的测量。还通过亚像素边缘检测技术提高了系统的测量精度,最后采用0级标准环规对系统进行了验证,其测量结果的重复不确定度优于0.4μm。并对深度为15 mm、直径为0.6 mm的孔在三维测量显微镜上进行了测量,实验证明此测量方法为大长径比的孔的检测提供了一种可行的方法。
Small gas laser cavity gain hole diameter of less than 1 mm, depth greater than 10 mm, aspect ratio, the traditional method is difficult to measure. In order to solve the problem of micro-deep hole measurement, a method of combining contact measurement and optical measurement is introduced. The end of the fiber with a luminous ball into the hole to be measured in the hole to be tested to do x, y direction of movement, when the ball contact with the hole wall, will cause the center of the ball to do the corresponding movement, the capture of light-emitting ball CCD The center of the sphere can be obtained through image processing. The xy coordinates of the sphere center at the contact point can be obtained and the multi-point measurement results can be fitted to achieve the measurement of the parameters such as the diameter, cylindricity and straightness of the deep hole. The subpixel edge detection technique is also used to improve the measurement accuracy of the system. Finally, the system is verified by the standard 0-level ring gauge. The repeated uncertainty of the measurement results is better than 0.4μm. The depth of 15 mm and the diameter of 0.6 mm were measured on a three-dimensional measuring microscope. Experiments show that this method provides a feasible method for the detection of large aspect ratio holes.