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石墨薄片材料的出气率及放出气体成分是上海光源光束线真空系统优化的重要依据。因此,采用小孔流导法实验装置测试经不同清洗处理的石墨薄片的出气率,并且通过四极质谱计监测测试过程中放出气体的成分。结果表明,不同清洗处理对石墨薄片的出气率的影响不大,而烘烤是降低石墨薄片出气率的有效方法。石墨薄片出气率在未经烘烤时为10-8Pa.L.s-1.cm-2量级,在140℃经48 h烘烤后为10-10Pa.L.s-1.cm-2量级。石墨薄片的残余气体谱图分析表明,与延长排气时间相比,烘烤是抽除石墨薄片吸附的清洗剂的有效措施。
Graphite material out of the gas rate and the release of gas composition of Shanghai Light source beam line vacuum system is an important basis for optimization. Therefore, the orifice flow conductivity test apparatus was used to test the outgassing rate of graphite sheets with different cleaning treatments, and the composition of the gas released during the test was monitored by a quadrupole mass spectrometer. The results show that different cleaning treatment has little effect on the gas exit rate of graphite flake, and baking is an effective method to reduce the gas out rate of graphite flake. Graphite sheet outgassing rate was in the range of 10-8Pa.L.s-1.cm-2 without baking and in the range of 10-10Pa.L.s-1.cm-2 after baking at 140 ℃ for 48h. Graphical analysis of the residual gas spectrum of graphite flake shows that baking is an effective measure to remove the adsorbent of graphite flake compared with the extended exhaust time.