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研究了射频电感耦合等离子体RF-ICP低温氮化304奥氏体不锈钢过程中离子束流的重要作用。带有负偏压的不锈钢样片被插入到射频电感耦合等离子体反应器中。氮离子束流密度和等离子体成分分别用毫安表和一个等离子体光发射谱仪来实时监测。XRD测试结果发现在不锈钢的表层出现了明显的多组分的氮化物微结构,这说明不锈钢成功地被氮化。系统地研究了离子流密度变化显著的影响不锈钢的氮化效果。随着离子束流密度的增加氮化物成分增加同时γ相奥氏体成分减少。同时也研究了氮离子流密度及等离子体发射谱线强度随操作压力、偏压的演变过程。通过实验数据分析提出了利用射频等离子体氮化304不锈钢的合理的氮化区。
The important role of ion beam current in RF-ICP low-temperature nitriding 304 austenitic stainless steel was studied. Stainless steel swatches with negative bias were inserted into the RF inductively coupled plasma reactor. Nitrogen ion beam current density and plasma composition were monitored in real time using a milliamp meter and a plasma optical emission spectrometer, respectively. The XRD test results show a clear multi-component nitrided microstructure on the stainless steel surface, indicating that the stainless steel is successfully nitrided. The effect of ion flux density on nitriding of stainless steel was systematically studied. As the ion beam current density increases, the nitride composition increases and the γ-phase austenite composition decreases. The evolution of nitrogen ion current density and plasma emission line intensity with operating pressure and bias voltage was also studied. Based on the experimental data analysis, a reasonable nitriding region of 304 stainless steel by RF plasma was proposed.