一、概述霍尔测试装置是研究半导体材料物理性质的基本实验装置。用它可以测量半导体材料载流子的霍尔迁移率、电阻率、霍尔系数以及这些参数随温度的变化量,从而可以研究半导体材料的导电过程,载流子散射机构;杂质在半导体中的能级位置,禁带宽度等基本物理量,并可对半导体单晶材料的掺杂浓度及补偿度进行测定。此装置是研究半导体材料性能的重要装置。近十余年来,国外这种测试装置发展得比较快。1979年美国凯茨利(Keithley)已有霍尔测试自动装置出售。我们研制的DH82型霍尔测试装置,经有关部门鉴定认为,本装置具有测试精度高、速度快、操作简便、结构合理、实现了数字化、造价低和 I. Overview Hall test device is to study the physical properties of semiconductor materials, the basic experimental device. It can be used to measure the semiconductor material carrier Hall mobility, resistivity, Hall coefficient and the amount of these parameters with temperature changes, which can study the conductive material of semiconductor materials, carrier scattering mechanism; impurities in the semiconductor Energy level position, forbidden band width and other basic physical quantities, and the semiconductor single crystal doping concentration and compensation can be measured. This device is an important device to study the performance of semiconductor materials. In the past ten years or more, such test equipment abroad has developed rapidly. In 1979, Keithley already had Hall test robots sold. We developed DH82-type Hall test device, identified by the relevant departments that the device has the test of high precision, fast, easy to operate, reasonable structure, to achieve a digital, low cost and