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用连续以及脉冲的CO2激光诱导三甲基氯硅烷的气相化学反应，制备SiC超细粉．脉冲激光以及高的激光功率密度有助于减少副反应，得到高纯度、圆形、粒度小而均匀，疏松不团聚的超细粉。
Continuous and pulsed CO2 laser induced trimethylchlorosilane vapor phase chemical reaction to prepare SiC ultrafine powder. Pulsed lasers and high laser power densities help to reduce side reactions, resulting in ultra-fine powders of high purity, roundness, small size, uniform, loose and unaggregated.