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测定硅中杂质元素的方法,以化学法和化学光谱法居多,1CP-AES和AAS法也有报导。这些方法均要进行化学处理。为了配合高级硅的生产,本文试验了不经化学处理,直接用硅粉进行杂质元素测定的AES法。以含氯化钾的碳粉作缓冲剂,铟作内标,可同时测定Al、Ca、Cr、Cu、Fe、Mg、Mn、Ni、Pb、Ti、V等元素,灵敏度可达10~(-2)～10~(-1)%,标准偏差和回收率均满意,适用于工厂的日常分析。
Determination of impurity elements in silicon methods, chemical and chemical spectrometry majority, 1CP-AES and AAS have also been reported. These methods require chemical treatment. In order to meet the advanced silicon production, this paper tested without chemical treatment, the direct use of silicon powder for the determination of impurity elements AES method. With potassium chloride as a buffer and indium as an internal standard, Al, Ca, Cr, Cu, Fe, Mg, Mn, Ni, Pb, Ti and V can be simultaneously measured with a sensitivity of 10 ~ -2) ~ 10 ~ (-1)%, standard deviation and recovery rate are satisfactory, suitable for routine analysis of the factory.