论文部分内容阅读
采用中频磁控溅射技术在AISI 440C钢表面制备了不同调制周期的Cr/Ag纳米多层薄膜.通过X射线衍射仪(XRD)及高分辨透射电子显微镜(HRTEM)分析表征了纳米多层薄膜的微观组织结构,通过划痕试验机与真空球-盘摩擦试验机分别测试了纳米多层薄膜膜-基结合强度及真空摩擦学性能,并与纯Ag薄膜及Cr/Ag双层薄膜进行了对比.结果表明:纳米多层结构可以显著提高Ag基固体润滑薄膜膜-基结合强度,Cr/Ag纳米多层薄膜在较高转速及载荷条件下表现出明显优于纯Ag及Cr/Ag双层薄膜的摩擦学性能.Cr薄膜层与钢基体表面良好结合以及纳米多层薄膜内良好的层间结合性能是纳米多层薄膜膜-基结合强度提高的主要原因.
Cr / Ag multilayered films with different modulation cycles were prepared by medium frequency magnetron sputtering on AISI 440C steel.An X-ray diffraction (XRD) and high resolution transmission electron microscopy (HRTEM) The micro-structure of nano-multi-layer film was tested by scratch tester and vacuum ball-disk friction tester. The bonding strength and vacuum tribological properties of nano-multi-layer film were tested respectively. The results were compared with pure Ag film and Cr / Ag double- The results show that the nano-multilayer structure can significantly improve the film-base bonding strength of the Ag-based solid lubricating films, and the Cr / Ag nano-multilayer films show significantly better performance than the pure Ag and Cr / Ag double layers under the condition of higher rotating speed and loading The tribological properties of the films.Combination between the Cr film layer and the steel substrate surface and the good interlaminar bonding in the nano-multilayer film are the main reasons for the increase of the film-base bonding strength of the nano-multilayered films.