论文部分内容阅读
由中国计量科学研究院王承钢、汪德宝、杨自本等研制成功的GLI-100型量块激光干涉仪,于1992年4月份通过国家技术鉴定。该仪器采用脉冲计数的测量原理,用柔性测头接触定位,实现了被测量块无需研合辅助面,又可用光波波长作为标准,对量块长度进行高精度直接测量。 量程:最大到100mm; 长度测量读数分度值:每一脉冲当量λ/128≈0.005μm; 长度测量不确定度:优于u_(0.99)=(0.05+0.5l)μm;其中,l为被测量块的长度(m)。
By the Chinese Institute of Metrology Wang Chenggang, Wang Debao, Yang Zi Ben successfully developed GLI-100-type laser interferometer, in April 1992 through the national technical appraisal. The instrument uses pulse counting measurement principle, the contact with the flexible probe positioning to achieve the measured piece without research ancillary surface, but also the wavelength of light as a standard, the length of the measuring block for high-precision direct measurement. Range: up to 100mm; length measurement readings Index value: each pulse equivalent λ / 128≈0.005μm; length measurement uncertainty: better than u_ (0.99) = (0.05 + 0.5l) μm; Measurement block length (m).