1.引言近年来测量固体、粉末体和液体的位置、位移、厚度和振动的非接触式传感器和仪器系统取得了明显的进展。科研和生产中常常提出接触式测量仪器所不能满足的要求,因此熟悉非接触式测量仪器的性能和能力是很必要的。 1. Introduction In recent years, significant progress has been made in non-contact sensors and instrumentation systems that measure the position, displacement, thickness and vibration of solids, powders and liquids. Scientific research and production are often made contact measuring instruments can not meet the requirements, so familiar with the performance and ability of non-contact measuring instruments is necessary.