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介绍了一种采用多孔质节流的新型空气静压导轨,其刚度可以达到400N/μm或者更高,具有这种刚度的空气静压导轨可以取代液体静压导轨,广泛应用于超精密机床中。
A new air static pressure guide with porous throttling is introduced, its rigidity can be up to 400N / μm or higher. The air static pressure guide with this stiffness can replace the hydrostatic guideway and is widely used in ultra-precision machine tool .