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类金刚石(DLC)膜是含有sp3杂化态的亚稳态非晶碳膜,是具有极高的硬度、化学稳定性和光学透明性的半导体材料。这篇综述介绍了用等离子体化学气相沉积DLC膜的沉积方法、所制备薄膜的特性及应用,最后展望了DLC膜的发展趋势。
Diamond-like carbon (DLC) film is a metastable amorphous carbon film containing sp3 hybrid state, which is a semiconductor material with extremely high hardness, chemical stability and optical transparency. This review presents the deposition of DLC films by plasma CVD and the properties and applications of the films prepared. Finally, the development trend of DLC films is forecasted.