为了开展多工况条件下的氙气质量流量精确校准,研制了氙气质量流量校准装置。本文介绍了校准装置的组成、校准原理,测试了极限真空度、漏放气率,进行了真空容器容积在线测量、校准过程中氙气温度变化及物态变化等研究,对校准结果进行了验证。该装置校准范围为(3×10~(-1)~2.6×10~3)m L/min(标准状态),相对合成标准不确定度为1.6%。 In order to carry out accurate calibration of xenon gas mass flow under multi-working conditions, a xenon gas mass flow calibration device was developed. In this paper, the composition of the calibration device, the principle of calibration, the ultimate vacuum, the leakage rate, the leakage rate, the on-line measurement of the volume of the vacuum vessel, the temperature change of xenon during the calibration process and the change of the physical state were investigated. The calibration range of this device is (3 × 10 -1 ~ 2.6 × 10 -3) m L / min (standard state), and the relative synthetic standard uncertainty is 1.6%.