一种表面粗糙度非接触快速测量的新方法

来源 :激光与光电子学进展 | 被引量 : 0次 | 上传用户:JohnStorm
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照射在样品表面的激光束随着表面粗糙度的不同,反射光密度分布将不同;表面粗糙度增大时,反射光密度将被扩展。本文根据这一原理,提出一种使用激光束快速测量表面粗糙度的无触点光学法。通过测量反射光密度分布曲线的半宽度,由高斯曲线系数的标准差计算表面粗糙度。文中给出了测量结果 The laser beam irradiated on the sample surface will have different distribution of reflected optical density as the surface roughness varies. When the surface roughness increases, the reflected optical density will be expanded. Based on this principle, this paper presents a non-contact optical method for rapid measurement of surface roughness using a laser beam. The surface roughness was calculated from the standard deviation of Gaussian curve coefficients by measuring the half-width of the reflected optical density distribution curve. The paper gives the measurement results
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