为实现对硅微机械与光纤组合式阵列传感器的核心敏感元件———微型硅梁的杨氏模量和内应力进行测试 ,提出了利用光纤耦合机理来测量微型硅梁的横向固有振动频率 ,进而推导梁构件杨氏模量和内应力的方法 ,原理简洁 ,具体实现也较为可行 ,从而为机械构件的机械性能测试分析提供了方法 ,具有实用意义 . In order to test the Young’s modulus and internal stress of the micro-silicon beam, which is the core sensitive element of silicon micromachined and fiber-optic hybrid array sensor, the method of measuring the transverse natural frequency of the micro-silicon beam by the fiber coupling mechanism is proposed. And then derive the method of Young’s modulus and internal stress of the beam component. The principle is simple and the concrete realization is feasible, which provides a method for the mechanical performance test and analysis of the mechanical component, which is of practical significance.