A New Activation Method for Electroless Metal Plating：Palladium Laden via Bonding with Self—Assembly

来源 :中国化学快报：英文版 | 被引量 : 0次 | 上传用户：aswe19

【摘要】

：

A new activation method has been developed for electroless copper plating on silicon wafer based on palladium chemisorption on SAMs of APTS without SnCl2 sensit

【作者】

：

LiNaXU JianHuiLIAO 等

【机构】

：

DepartmentofChemistryandChemicalEngineering,NationalLaboratoryofMolecularandBiomolecularElectronics

【出处】

：

中国化学快报：英文版

【发表日期】

：

2002年7期

【关键词】

：

活化方法非电解金属镀层钯化学吸附化学金属镀层自集合单层非电解铜镀层 Palladium chemisorption amino group SAM

【基金项目】

：

国家自然科学基金，Promotional Foundation of Ministry of Education of China for excellent youth teacher，Open Project Foundation of Laboratory of Solid State Microstructures of Nanjing University

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A new activation method has been developed for electroless copper plating on silicon wafer based on palladium chemisorption on SAMs of APTS without SnCl2 sensitization and roughening condition. A closely packed electroless copper film with strong adhesion

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A New Activation Method for Electroless Metal Plating：Palladium Laden via Bonding with Self—Assembly

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