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光学元件受到污染后其光学性能会变差 ,如何对其进行清洗 ,尽可能地恢复其原来的性能 ,使其能够重新使用显得很重要。本文介绍一种碳污染的原位清洗方法———射频弧光放电法 ,利用原子氧与光学元件表面所沉积的碳反应以达到清洗的目的。清洗装置建立后对北京同步辐射装置 (BSRF)上所使用的光学元件进行了清洗 ,取得了较好的效果。
Optical components contaminated optical properties will deteriorate, how to clean it, as much as possible to restore its original performance, make it possible to re-use it is very important. This article describes a carbon pollution in situ cleaning method --- RF arc discharge method, the use of atomic oxygen and optical elements deposited on the surface of the carbon reaction to achieve the purpose of cleaning. After the establishment of the cleaning device, the optical components used on the Beijing Synchrotron Radiation Facility (BSRF) were cleaned and achieved good results.