论文部分内容阅读
介绍了一种结构简单的熔接式全石英光纤非本征型法布里-珀罗干涉仪(EFPI)高静压传感器,对传感器的压力效应进行了理论分析,给出了传感器的设计结构和制作过程。和传统EFPI传感器相比,该传感器具有长腔长、结构简单、制作工艺简易、应用灵活方便等优点,可以用于较高静态压力的测量。建立了传感解调系统,对压力进行了测试,测量精确度高,稳定性好。同时进行了温度敏感度测量实验,温度敏感系数约为0.72nm/℃,传感器的腔长温度线性度好,结果显示传感器温度交叉敏感度低。在0~20 MPa压力测量范围内,该传感器的压力腔长灵敏度可以达到21nm/MPa,连续10h动态测量条件下,测量偏差为0.2%FS。
A simple structure of all-quartz fused fiber extrinsic Fabry-Perot interferometer (EFPI) high static pressure sensor is introduced, and the pressure effect of the sensor is theoretically analyzed. The design structure of the sensor Production process. Compared with the traditional EFPI sensor, the sensor has the advantages of long cavity length, simple structure, simple manufacturing process and flexible application, and can be used for measuring the higher static pressure. The sensor demodulation system was established to test the pressure, the measurement accuracy is high and the stability is good. At the same time, the temperature sensitivity experiment was carried out. The temperature sensitivity coefficient was about 0.72nm / ℃. The linearity of the cavity length of the sensor was good. The result showed that the cross-sensitivity of the sensor was low. The pressure sensitivity of the sensor can reach 21nm / MPa within the pressure measuring range of 0 ~ 20 MPa, and the measurement deviation is 0.2% FS under the condition of 10h dynamic measurement.