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利用有效媒质理论描述了金属薄膜形成过程中电导率变化规律,与实验测得的Al薄膜形成过程中电导率变化结果比较接近.分析和讨论了一些影响计算结果准确性的因素.
The effective medium theory was used to describe the conductivity variation during the formation of metal thin films. The results show that the conductivities of Al thin films are close to those obtained experimentally. Some factors influencing the accuracy of the results are analyzed and discussed.