论文部分内容阅读
光学技术对于现代科学尤其是航天科学的发展起着越来越重要的作用。而具有高精度大口径光学元器件的跨尺度加工一直是现代光学技术的难点。超精密气囊抛光技术是基于计算机控制光学表面成形技术。其采用充气的柔性抛光气囊作为抛光工具,解决了传统数控抛光方法中抛光头不能很好地和工件吻合的缺点。以Preston方程为基础,研究了超精密气囊抛光的理论材料去除特性,建立了气囊抛光中“进动”运动方式下的材料去除模型,并针对气囊抛光工具的物理特性,按照Hertz接触理论对去除模型进行了修正。在理论分析的基础上完成了一块口径为570 mm的平面楔形工件的抛光,使得工件的面形精度P-V值达到了1/8λ,RMS值达到1/75λ。并分析了该元件的功率谱密度(PSD)曲线,窄带噪声及其产生原因。
Optical technology plays an increasingly important role in the development of modern science, especially aerospace science. The cross-scale processing of high-precision large-aperture optical components has always been a challenge of modern optical technology. Ultra-precision airbag polishing technology is based on computer-controlled optical surface forming technology. The use of inflatable flexible polishing airbag as a polishing tool to solve the traditional CNC polishing method in the polishing head does not fit well and the shortcomings of the workpiece. Based on the Preston equation, the theoretical material removal characteristics of ultra-precision airbag polishing were studied. The material removal model under “precession” movement mode in airbag polishing was established. According to the physical characteristics of the airbag polishing tool, the Hertz contact theory The removal of the model was amended. On the basis of theoretical analysis, the polishing of a planar wedge workpiece with a caliber of 570 mm was completed. The P - V value of the workpiece was 1/8λ and the RMS value was 1 / 75λ. The power spectral density (PSD) curve, narrowband noise and its causes were analyzed.