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干磨可以造成工具表面的温度上升到800~1000℃.因此,能在如此高温度下为切削工具提供保护的膜层已成为研究的热点.ZrAlN由于Al元素的存在可能具有高温稳定的结构和机械性能.用直流磁控溅射的方法合成了ZrAlN薄膜.利用XRD与纳米压痕仪分析了反应气体分压和基底偏压对薄膜结构、机械性能及其高温热稳定性的影响.在最佳条件(基底偏压-37V,N2分压为2×10-5Pa)制备的ZrAlN薄膜具有平滑的表面且其硬度具有热稳定性.在退火之后,该薄膜的应力由2.2GPa降至0.7GPa.薄膜的高温热稳定性可能与Al2O3和ZrO2晶相的形成有着直接的联系.
Dry grinding can cause the temperature of the tool surface to rise to 800 to 1000 ° C. Therefore, a film capable of providing protection for cutting tools at such a high temperature has become a research hotspot.ZrAlN may have a high-temperature stable structure due to the presence of Al elements and Mechanical properties: ZrAlN thin films were synthesized by DC magnetron sputtering.The effects of reaction gas partial pressure and substrate bias on the structure, mechanical properties and thermal stability of thin films were analyzed by XRD and Nanoindenter. The ZrAlN thin film prepared under good conditions (substrate bias of -37V and partial pressure of N2 of 2 × 10-5Pa) has a smooth surface and its hardness has thermal stability. After annealing, the stress of the thin film decreases from 2.2GPa to 0.7GPa The high temperature thermal stability of the film may be directly related to the formation of the crystalline phase of Al2O3 and ZrO2.