Terahertz(THz) technology promises important applications including imaging, spectroscopy,and communications. However, one of limitations at present for advancing THz applications is the lack of efficient devices to manipulate THz waves. Here, our recent important progresses in THz functional devices based on artificial microstructures, such as photonic crystal, metamaterial, and plasmonic structures, have been reviewed in this paper, involving the THz modulator, isolator, and sensor. These THz microstructure functional devices exhibit great promising potential in THz application systems. Terahertz (THz) technology promises important applications including imaging, spectroscopy, and communications. However, one of limitations at present for advancing THz applications is the lack of efficient devices to manipulate THz waves. Here, our recent important progresses in THz functional devices based on artificial microstructures, such as photonic crystal, metamaterial, and plasmonic structures, have been reviewed in this paper, involving the THz modulator, isolator, and sensor. These THz microstructure functional devices exhibit great promising potential in THz application systems.