一、前言 本文介绍一种制造透明导电膜的方法,即用高纯铟作膜料,通过电阻蒸发制成氧化钢透明导电膜。由于它不是用合金而是用高纯铟作膜料,故节省了原料。由于它用电阻蒸发镀膜而不用电子束蒸发,所以省去价格昂贵的具有电子束蒸发的镀膜机,另外由于此法可以一次成膜,不必再在大 I. INTRODUCTION This article describes a method of manufacturing a transparent conductive film that uses high-purity indium as a film material and is made into a transparent conductive oxide film of steel by resistance evaporation. Because it is not with the alloy but with high-purity indium for film material, it saves raw materials. Because it uses resistance evaporation coating without electron beam evaporation, thus eliminating the need for expensive electron beam evaporation coating machine, in addition to this method can be a film, do not have to