论文部分内容阅读
利用MEVVA强流金属离子注入机，对65Nb钢进行离子注入采用了Auger电子能潜（AES），X射线衍射（XRD）等表面分析技术，研究了Ti及Ti+Y离子注入后的65Nb钢表面的微结构变化，力学性能实验结果表明，Ti及Ti＋Y离子注入能使材料表面硬度和耐磨性最著提高，且双元离子注入比单元注入效果好，着重分析和讨论了稀土元素Y在离子注入层中的合金化作用
The surface of 65Nb steel was ion-implanted with MEVVA high-intensity metal ion implanter using Auger electron energy potential (AES) and X-ray diffraction (XRD). The surface of 65Nb steel after Ti and Ti + Y ion implantation was studied. The experimental results of mechanical properties show that Ti and Ti + Y ion implantation can improve the surface hardness and wear resistance of the material, and the effect of dual ion implantation is better than that of the unit. The effects of rare earth element Y on the ion Alloying in the implanted layer