论文部分内容阅读
采用射频磁控溅射方法制备超亲水TiO_2/SiO_2复合薄膜。采用X射线衍射仪(XRD)、原子力显微镜(AFM)、液滴形状分析仪等测试手段表征薄膜的晶体结构、微观形貌和亲水性能。研究SiO_2含量对TiO_2/SiO_2复合薄膜晶相、微观形貌和亲水性的影响。结果表明:TiO_2/SiO_2复合薄膜呈现非晶态,掺入SiO_2后,减小了TiO_2的晶粒尺寸,提高了TiO_2薄膜的成膜质量,使薄膜的比表面积增加。随着SiO_2含量的增加,薄膜的接触角越来越小,热处理之后的薄膜呈现超亲水性。
Preparation of Superhydrophilic TiO_2 / SiO_2 Composite Films by RF Magnetron Sputtering. X-ray diffraction (XRD), atomic force microscope (AFM) and droplet shape analyzer were used to characterize the crystal structure, morphology and hydrophilicity of the films. The effects of SiO_2 content on the crystal phase, morphology and hydrophilicity of TiO_2 / SiO_2 composite films were investigated. The results show that the TiO_2 / SiO_2 composite films are amorphous, and the addition of SiO_2 can reduce the grain size of TiO_2 and increase the film quality of the TiO_2 films, and increase the specific surface area of the films. With the increase of SiO 2 content, the contact angles of the films become smaller and smaller, and the films after heat treatment show superhydrophilicity.