一、前言热式气体质量流量传感器是气体质量流量控制器中一个重要的核心部件,对气体质量流量控制器的性能指标,如零漂、准确度、线性、重复度、响应时间等重要指标参数有直接影响。要使气体质量流量控制器的性能指标得到明显改善,首先就要提升热式气体质量流量传感器的性能。然而,热式气体质量流量传感器的性能与其本身的结构参数设计是密切相关的。如 I. INTRODUCTION The thermal gas mass flow sensor is an important core component of the gas mass flow controller. The performance parameters of the gas mass flow controller, such as zero drift, accuracy, linearity, repeatability, response time and other important parameters Have a direct impact. For a significant improvement in the performance of a gas mass flow controller, the first thing to do is to improve the performance of the thermal gas mass flow sensor. However, the performance of a thermal gas mass flow sensor is closely related to its own structural parameter design. Such as