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在TCO玻璃衬底上依次采用化学水浴法和真空热蒸发工艺沉积CdS、CdTe薄膜,并在不同条件下进行热处理,制备了CdS/CdTe异质结复合薄膜。通过X射线衍射、扫描电镜,紫外-可见(U-V)透射光谱研究了不同温度下稀土Nd掺杂以及Ar-CdCl2热处理对薄膜结构、形貌和光学性能的影响。结果表明:不同条件下制备的薄膜均具有(111)晶面择优取向;样品表面形貌在不同条件下热处理后存在剧烈的差异,随着热处理温度的升高,薄膜晶粒增大;掺入Nd并在Ar-CdCl2氛围下热处理后,薄膜致密且粒径均匀,粒径明显增大,其(111)晶面的择优取向进一步增强。U-V透射光谱分析表明,Ar气氛下热处理对改善薄膜的光吸收作用并不明显,但掺Nd和在Ar-CdCl2氛围下热处理均可明显增强薄膜的光吸收性能,这对于提高太阳电池的光谱响应是非常有利的。
CdS and CdTe films were deposited on TCO glass substrates by chemical bath and vacuum thermal evaporation in sequence and then heat treated under different conditions to prepare CdS / CdTe heterojunction composite films. The effects of rare earth Nd doping and Ar-CdCl2 heat treatment on the structure, morphology and optical properties of the films were investigated by X-ray diffraction, scanning electron microscopy and UV-visible transmission spectroscopy. The results show that the films prepared under different conditions have the preferred orientation of (111) crystal plane. The surface morphology of the samples has a dramatic difference after heat treatment under different conditions. With the increase of the heat treatment temperature, the crystal grains of the films increase. Nd and annealed under the atmosphere of Ar-CdCl2, the films are dense and uniform in size with a marked increase in grain size, and the preferred orientation of the (111) crystal face is further enhanced. UV transmission spectrum analysis showed that the effect of heat treatment in Ar atmosphere on the light absorption of the film is not obvious, but Nd-doped and Ar-CdCl2 atmosphere heat treatment can significantly enhance the light absorption properties of the film, which is to improve the solar cell spectral response It is very advantageous.