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低温真空泵作为一种高比抽气速率和极洁净的高真空泵,在很多科研和工业加工方面的应用越来越广泛。一般低温真空泵大多以G-M制冷机作为冷源。本文针对G-M制冷机中的二级密封作用进行了实验研究,结果表明:当温度下降到80 K以下区间,二级蓄热材料的热容发生转变,热容量变小,制冷量不足,从而影响到低温泵的极限制冷温度,二级密封的作用显著体现。
Low-temperature vacuum pump as a high specific pumping rate and very clean high vacuum pump, in many scientific research and industrial processing applications more and more widely. Most low-temperature vacuum pumps are mostly G-M refrigerator as a cold source. In this paper, an experimental study on the secondary sealing effect in a GM refrigerator was carried out. The results show that when the temperature drops below 80 K, the heat capacity of the secondary storage material changes, the heat capacity becomes smaller and the cooling capacity is insufficient, The ultimate cooling temperature of the cryogenic pump, the role of secondary seal significantly reflected.