1.序言 最近,以半导体传感器为中心的新型传感器的大量研制,以及这些新型传感器的应用,使精度更高、稳定性好的工业用测量仪器已商品化。作为这些测量仪器之一而广泛应用于测量流量、压力、液面、比重等方面的电子式差压变送器和电子式压力传送器(以下把两者总称为传感器),也都使用了新型传感器。 1963年日立制作所将金属应变计作为 1. Introduction Recently, a large number of new sensors based on semiconductor sensors and the application of these new sensors have led to the commercialization of industrial measuring instruments with higher precision and better stability. As one of these measuring instruments, it is widely used in electronic differential pressure transmitters and electronic pressure transmitters (hereinafter collectively referred to as sensors) for measuring flow rate, pressure, liquid level, specific gravity, etc., sensor. Hitachi 1963 metal strain gauge as