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本文综合评述了国内外纳电子器件和新原理的纳功能器件的最新进展,指出硅基微电子技术正在向与新的、目前尚不明确核心技术的纳信息技术共同发展的方向转型,这是我国信息技术和产业后来居上的重要机遇。基于纳尺度各种显著的物理效应和多场耦合原理,开展低维纳功能器件的新原理、新性能、新架构的深入系统的研究,具有重大科学与现实意义。这类纳信息功能器件与硅芯片技术相融合的设计、工艺和技术将是需要突破的重大问题。随着纳米科学技术研究的重点向功能化器件系统方向发展,如何加强以产业发展为背景的研究,特别是加强微纳电子、芯片设计制造业与纳米科技基础研究的结合,加强微纳硅工艺与新的纳米技术的结合,加强高水平科学研究发现与关键技术创新的结合,是我国纳米科学技术发展的重要问题。
This review summarizes recent advances in nanofunctional devices that incorporate both nanoelectronic devices and new principles at home and abroad and points out that silicon-based microelectronic technology is shifting toward a common development with new, currently unsolved, core technologies. China’s information technology and industry come from behind an important opportunity. Based on various significant physical effects and multi-field coupling principles of nanoscale, it is of great scientific and practical significance to carry out in-depth and systematic researches on new principles, new features and new architectures of low-Wiener functional devices. Design, process and technology that incorporate such information-enabled devices and silicon-on-chip technology will be major issues that need to be overcome. With the focus of nanoscience and technology research on the direction of functional device systems, how to strengthen the research on the background of industry development, especially the combination of micro and nano electronics, chip design and manufacturing industry and basic research of nano science and technology, With the combination of new nanotechnology and strengthening the combination of high-level scientific research findings with key technological innovations, it is an important issue for the development of nanoscience and technology in our country.