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依据微机械谐振陀螺的结构和工作原理 ,利用ANSYS有限元仿真软件对微机械谐振陀螺的设计进行了计算和仿真 .首先计算了陀螺的驱动模态固有频率和检测模态的固有频率 ,分析了在检测方向的输出位移、哥氏力与输入驱动信号频率之间的关系 ,在这基础上 ,得出当驱动模态的固有频率与检测模态的固有频率比较接近时 ,输出哥氏力灵敏度较大 .同时还分析了内框架梁与外框架梁对陀螺驱动模态与检测模态固有频率的影响 ,并以此为基础 ,提出了调节陀螺驱动模态固有频率与检测模态固有频率的方法
According to the structure and working principle of MEMS gyroscope, the design and simulation of MEMS gyroscope are carried out by using ANSYS finite element simulation software.Firstly, the natural frequency of driving mode and the natural frequency of the modal are calculated, In the detection of the direction of the output displacement, Coriolis force and the input drive signal frequency relationship between, based on that, when the natural frequency of the driving mode and the detection mode of the natural frequency is relatively close, the output Coriolis force sensitivity And the influences of the inner frame beam and the outer frame beam on the gyro driving mode and the detecting mode natural frequency are analyzed.At the same time, it is proposed to adjust the natural frequency of the gyro-driven mode and the detection mode natural frequency method