研究了校平退火用模具材料及退火温度对厚度0.1 mm的高精度钨片平面度、硬度及弯曲角的影响。结果表明:采用高温钼合金板作为校平退火模具,可以保证δ0.1mm钨片平面度值最优;采用850℃保温1.5 h的热处理工艺,可以得到平面度效果最好,且具有较高硬度和优良弯曲性能的δ0.1 mm钨片;专用校平模具自身平面度小于0.05 mm时,δ0.1 mm钨片平面度最好,且校平效果稳定。 The effects of the leveled annealing mold material and annealing temperature on the flatness, hardness and bending angle of high precision tungsten sheet with a thickness of 0.1 mm were studied. The results show that the flatness of δ0.1mm tungsten plate can be guaranteed by adopting the high temperature molybdenum alloy plate as the leveled annealing mold. The flatness degree can be obtained best with the heat treatment of 850 ℃ for 1.5 h, And δ0.1 mm tungsten plate with excellent bending performance. When the flatness of the special leveling die is less than 0.05 mm, the flatness of the δ0.1 mm tungsten plate is the best, and the leveling effect is stable.