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为解决谐振腔增强型(RCE)光探测器的耦合效率和响应速率的矛盾,提出了采用特殊图案透明欧姆接触的微结构及其制备工艺方案,从而使得在器件入光面积不变的情况下,欧姆接触部分的总面积显著减小,在不影响器件量子效率的前提下达到减小电容、提高响应速率的目的。在台面面积为50μm×50μm的情况下,获得了18 GHz的响应带宽。研制的谐振腔增强型光探测器的响应速率得到了显著的提高。
In order to solve the contradiction between the coupling efficiency and the response speed of a cavity-enhanced (RCE) photodetector, a microstructure with a transparent transparent ohmic contact with a special pattern and a process for preparing the same are proposed, so that when the incident light area of the device is constant , The total area of the ohmic contact part is significantly reduced, and the purpose of reducing the capacitance and improving the response speed is achieved without affecting the quantum efficiency of the device. With a mesa area of 50 μm × 50 μm, a response bandwidth of 18 GHz was obtained. The developed resonator-enhanced photodetector response rate has been significantly improved.