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利用四靶闭合场非平衡磁控溅射(CFUBMS)技术在石英玻璃和抛光不锈钢片两种基底上制备含有Cr、Ti和Al元素组合的各种氮化物涂层。采用摩擦磨损仪测试涂层摩擦系数,应用金相显微镜对各个涂层磨痕形态进行分析,结果表明TiN、CrN、TiAlN、CrAlN以及CrTiAlN涂层的摩擦系数依次减小,耐磨特性依次提高;结合涂层的X射线光电子能谱分析,可以得到含有Al元素涂层中形成了AlN的结构,提高涂层的硬度,增加耐磨特性;在涂层中含有Cr元素形成了氧化物Cr2O3可以提高涂层自排屑能力,减小摩擦系数,增加耐磨特性,含Ti元素形成的氧化物TiO2则不利于涂层的摩擦磨损特性;由于CrTiAlN本身具有比三元氮化物更高的涂层硬度,且含有Al和Cr元素,因此该涂层具有最好的摩擦磨损性能。
Various nitride coatings containing a combination of Cr, Ti and Al elements were prepared on both quartz glass and polished stainless steel sheets using a four-target closed field unbalanced magnetron sputtering (CFUBMS) technique. The wear coefficient of the coating was measured by friction and wear tester. The morphology of each coating was analyzed by optical microscopy. The results showed that the friction coefficients of TiN, CrN, TiAlN, CrAlN and CrTiAlN coatings decreased in turn and the wear resistance improved in turn. In combination with the X-ray photoelectron spectroscopy analysis of the coating layer, the AlN-containing coating layer can be formed and the hardness of the coating layer can be increased, and the wear resistance can be enhanced. In the coating layer, Cr2O3 is added to form oxide Cr2O3, Coating self-chip ability to reduce the friction coefficient and increase the wear resistance characteristics, the formation of Ti-containing oxide TiO2 is not conducive to the friction and wear properties of the coating; As CrTiAlN itself has a higher than the ternary nitride coating hardness , And contains Al and Cr elements, the coating has the best friction and wear properties.