论文部分内容阅读
阐述高分辨力光刻机的图像对准系统的原理及实现过程。着重介绍图像处理技术在高精度对准系统中的应用。并讨论系统应用中的图像处理算法。
Describes the principle and realization process of high-resolution lithography machine’s image alignment system. The emphasis is put on the application of image processing technology in high-precision alignment system. And discusses the system application of image processing algorithms.