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Ｔｉ（７０）Ｎｉ（２０）Ｓｉ（１０）非晶合会在５００－８００℃范围内经１ｈ退火后。可形成平均晶粒度为８－１２０ｎｍ的纳米合金．Ｘ射线衍射（ＸＲＤ）和透射电镜（ＴＥＭ）的结果表明。不同平均晶粒度的纳米合金样品中，相的组成相同．即Ｔｉ２Ｎｉ和Ｔｉ５Ｓｉ３以及少量的α－Ｔｉ晶体相．显微硬度（ＨＶ）的测量表明，纳米合金样品的显微硬度值比铸态或非晶态样品高一倍左右，但是，随着平均晶粒度的减小，硬度值的变化并不满足线性的Ｈａｌｌ－ｐｅｔｃｈ关系。
Ti (70) Ni (20) Si (10) amorphous alloy after annealing in the range of 500-800 ℃ after 1h. A nano-alloy with an average grain size of 8-120 nm can be formed. X-ray diffraction (XRD) and transmission electron microscopy (TEM) results show. The nano-alloy samples with different average grain sizes have the same phase composition. Namely Ti2Ni and Ti5Si3 and a small amount of α-Ti crystal phase. Measurement of microhardness (HV) shows that the microhardness of nano-alloy samples is about twice as high as that of as-cast or amorphous samples. However, with the decrease of average grain size, the change of hardness value is not satisfied Linear Hall-petch relationship.