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在103兆赫YZ铌酸锂声表面波换能器(SAW)上面(电极间距离为3厘米)进行了机械应力效应实验。在应力为-90×10~(-6)时相位漂移是40°,并且相移与应力成很好的线性关系。SAW压力传感器的最佳设计,包括一个箝位楔形压电薄膜,在上面制作两组叉指电极。确定了电极的最佳位置。在压力作用下薄膜偏斜就会使一组叉指电极的相位迟后而使另一组的相位推前。热膨胀效应的最大相位漂移和抵偿通过测量这两组电极的相位差而得到。
Mechanical stress effects experiments were performed on a 103 MHz YZ lithium niobate SAW (electrode spacing of 3 cm). The phase shift is 40 ° at -90 × 10 -6 (-6), and the phase shift is in good linear relationship with the stress. The SAW pressure sensor is optimally designed to include a wedge-clamped piezoelectric film on which two sets of interdigital electrodes are made. Determine the best location of the electrode. The deflection of the film under pressure causes the phase of one set of interdigital electrodes to lag behind and the phase of the other to advance. The maximum phase shift and offset of the thermal expansion effect is obtained by measuring the phase difference between the two sets of electrodes.