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利用激光辅助合金的方法 ,生成InP表面AuGeNi InP合金 ,并形成良好的欧姆接触 ,上下表面面间电阻为5 .8Ω。研究了合金工艺参量 (如合金时间、合金温度、镀膜厚度等 )对形成欧姆接触性能的影响
The use of laser-assisted alloy method to generate InP surface AuGeNi InP alloy and form a good ohmic contact, the upper and lower surface area resistance of 5. 8Ω. The effects of alloy processing parameters (such as alloy time, alloy temperature, coating thickness, etc.) on the ohmic contact properties were studied