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为使用大面积均匀分布的微球掩模制作纳米柱LED,对胶体微球单层薄膜的自组装技术进行了研究。采用旋涂法、滴定法和气液界面法,对2μm和455nm两种粒径的胶体微球进行自组装实验,并使用扫描电子显微镜进行观察和比较,分析了三种方法的优缺点。实验结果表明,旋涂法在制备过程中容易出现多层堆积现象;滴定法容易形成单层薄膜,但胶体微球较为稀疏;气液界面法可以实现较大面积的单层薄膜,胶体微球均匀分布,而且适用于各种基片,是一种简单有效的自组装方法。优选气液界面法,在GaN基LED外延片上制备了均匀分布的纳米柱结构,验证了这种方法用于纳米柱LED芯片制备的可行性。
In order to fabricate nano-column LEDs using a large area uniformly distributed microsphere mask, the self-assembly technique of the monolayers of colloidal microspheres was studied. The spin-coating method, titration method and gas-liquid interface method were used to self-assemble the 2μm and 455nm colloidal microspheres. Scanning electron microscopy was used to observe and compare the advantages and disadvantages of the three methods. The experimental results show that the spin-coating method is prone to multi-layer deposition phenomenon in the preparation process; the titration method is easy to form a single film, but colloidal microspheres are more sparse; the gas-liquid interface method can achieve a larger area of single-layer film, colloidal microspheres Uniform distribution, but also for a variety of substrates, is a simple and effective self-assembly method. The gas-liquid interfacial method was used to fabricate a uniformly distributed nano-pillar structure on the GaN-based LED epitaxial wafers. The feasibility of this method for preparing nano-column LED chips was verified.