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介绍了准分子激光镀膜的原理、设备的设计和建立,以及激光制铜、铜铁多层膜的初步工艺。研究了利用磁控溅射制备的镁硅混合膜的百分含量与薄膜的电阻率的关系,通过测量薄膜的电阻率来判断薄膜表面是否均匀。
Introduced the principle of excimer laser coating, equipment design and establishment, as well as laser copper, copper and iron multilayer film of the initial process. The relationship between the percentage content of the Mg-Si mixed film prepared by magnetron sputtering and the resistivity of the film was investigated. Whether the surface of the film was uniform or not was determined by measuring the resistivity of the film.