An increasing {110} orientation degree behavior was observed during etching of chemical vapor deposition (CVD) diamond films by partially melting Ce-7％Fe alloys.In order to accurately investigate this phenomenon,the X-ray diffraction method was used to identify the changes in the surface crystal orientation of the diamond films etched by Ce-7％Fe alloys,and evolution of orientation along the growth direction of the un-etched diamond film was analyzed by electron backscattering diffraction (EBSD),and then the morphology of etched diamond surface was observed by scanning electron microscopy (SEM).The results showed that the {110 } orientation degree of diamond surface increased due to the anisotropy in diamond etching with Ce-7％Fe,which was verified by the etching "pit" in SEM micrographs.