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单行载流子光探测器(UTC-PD)是一种只采用电子作为有源载流子的高速光探测器。本文研究了一种UTC-PD的吸收层采用高斯掺杂方式形成内建电场从而提高探测器高速性能的新方法。采用漂移-扩散理论分析了单行载流子光探测器(UTC-PD)的光响应特性,对影响探测器性能的因素进行分析,利用器件仿真器ATLAS对吸收层采用高斯掺杂的UTC-PD和吸收层采用均匀掺杂的UTC-PD能带结构和性能进行仿真比较。根据仿真结果显示,吸收层采用Gaussian掺杂的UTC-PD的带宽为74GHz,是吸收层采用均匀掺杂的UTC-PD的1.8倍。
A single-line carrier-light photodetector (UTC-PD) is a high-speed photodetector that uses only electrons as active carriers. In this paper, we study a new method of using Gaussian doping to form a built-in electric field in the absorption layer of UTC-PD to improve the detector’s high-speed performance. The photoresponse characteristics of a single-row carrier-photodetector (UTC-PD) were analyzed by using drift-diffusion theory. The factors influencing the performance of the detector were analyzed. Using the device simulator ATLAS, the Gaussian-doped UTC-PD And the absorption layer using uniform doping UTC-PD band structure and performance simulation comparison. According to the simulation results, the UTC-PD with Gaussian doping of the absorption layer has a bandwidth of 74 GHz, which is 1.8 times that of the uniformly doped UTC-PD of the absorption layer.