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为满足光刻机控制系统对超过20个处理器同步并行计算的需求,提出了一种多处理器同步控制系统架构.该架构采用一种分布式处理器的数据轮询调度机制,通过基于无握手传输协议的自定义数据总线,实现多块板卡处理器内数据高速低延时共享.为解决多处理器计算同步问题,系统采用时钟校准机制,使得挂接于总线的运动控制卡能够在每个伺服周期进行时钟校准,保证了系统的精密同步运行.在线重构设计实现了系统通过上位机对各个处理器间所需交互数据的灵活在线修改.测试结果表明:系统总线数据交互能力能够达到160m/s,板卡间信号延时低于10ns,能够满足光刻机控制系统的需求.
In order to meet the need of synchronous control of more than 20 processors in lithography control system, a multiprocessor synchronous control system architecture is proposed, which adopts a distributed processor data polling scheduling mechanism, Handshake transmission protocol custom data bus to achieve multiple high-speed low-latency board processor data sharing.In order to solve the problem of multi-processor computing synchronization, the system uses a clock calibration mechanism, making the motion control card mounted on the bus in the Each servo cycle clock calibration, to ensure the system’s precision synchronous operation.Online reconstruction design to achieve the system through the host computer for each processor required interactive data between the flexible online modifications.Experimental results show that: the system bus data interaction ability Reaching 160m / s, signal delay between boards less than 10ns, to meet the needs of lithography control system.