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利用朗谬尔静电探针技术对双层辉光离子渗金属的等离子体参数进行了初步诊断．结果表明，等离子体电位和电子温度随气压的升高平缓下降，而等离子体密度则随气压的增加而提高，等离子体电位和电子温度均随源极电压和工件阴极电压的增加而降低．在适当的工艺条件下，源极和阴极之间产生了不等电位空心阴极效应，等离子体密度从１０１０数量级增加到１０１２ｃｍ－３．
The plasma parameters of double glow-plasma ion-permeable metal were preliminarily diagnosed by Langmuir electrostatic probe technique. The results show that the plasma potential and the electron temperature decrease gently with the increase of the pressure, while the plasma density increases with the increase of the pressure. Both the plasma potential and the electron temperature decrease with the increase of the source voltage and the cathode voltage of the workpiece. Under appropriate process conditions, a hollow cathodic effect of unequal potential was generated between the source and the cathode, and the plasma density increased from 1010 to 1012 cm-3.