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采用光学显微镜在透射光、反射光和侧光模式下研究了多晶CVD金刚石厚膜中黑色缺陷的存在形式,利用X射线光电子能谱、拉曼光谱研究了黑色缺陷的组成成分。结果表明:晶界处的裂隙或者孔洞和晶粒内部的结晶缺陷是金刚石膜内部黑色缺陷的存在形式之一。
The existence of black defects in the polycrystalline CVD diamond thick film was investigated by optical microscope in transmitted light, reflected light and side light mode. The composition of black defects was studied by X-ray photoelectron spectroscopy and Raman spectroscopy. The results show that the cracks or holes in the grain boundaries and the crystal defects in the grains are one of the existing forms of black defects in the diamond films.