论文部分内容阅读
通过分析现有的基于在高温超导体超导转变温区的热效应及光子效应的薄膜型器件的结构特点和光电特性,讨论了利用单片折射型微透镜进行高温超导薄膜红外探测器光电响应性能改善的可行性,给出了几种典型的可与高温超导薄膜红外探测器耦合的单片面阵硅折射型微透镜阵列的SEM 测试结果及主要的几项参数指标。
By analyzing the structural characteristics and photoelectric properties of thin-film devices based on the thermal and photon effect in the superconducting transition temperature region of high-temperature superconductors, the paper discusses the application of monolithic refraction-type microlenses to the photoelectric response of high-temperature superconducting thin film infrared detectors The feasibility and feasibility of this method are discussed. SEM results of several typical single-chip silicon-refractive microlens arrays coupled with high-temperature superconducting thin-film infrared detectors are presented and the main parameters are given.